Solvay and partners unveil ecoFluor project to cut emissions in semiconductor industry
Published: Monday, 21 December 2015
Belgian group to work with US and German experts on product that aims to reduce pollution from CVD chambers.
Belgian chemical giant Solvay SA has teamed up with US-based
semiconductor company, Texas In-struments Inc. and German
technology specialist, Muegge and Fraunhofer EMFT, to launch a
range of fluorine-based products to reduce harm-ful gases
released by thin film tools used during the production of