Solvay and partners unveil ecoFluor project to cut emissions in semiconductor industry
Published: Monday, 21 December 2015
Belgian group to work with US and German experts on product that aims to reduce pollution from CVD chambers.
Belgian chemical giant Solvay SA has teamed up with US-based
semiconductor company, Texas In-struments Inc. and German
technology specialist, Muegge and Fraunhofer EMFT, to launch a
range of fluorine-based products to reduce harm-ful gases
released by thin film tools used during the production of
The three-year project will focus on new cleaning processes
for chemical vapour deposition (CVD) chambers and replaces the
three major cleaning gases, hexafluoroethane
(CF4) and nitrogen trifluoride (NF3),
with gas mixtures based on fluorine (F2), nitrogen
(N2) and argon (Ar) mixtures.
Semiconductors are used in a variety of products, including
mobile phones, cars, laptops and tablet PCs.
"EcoFluor’s cleaner alternative will reduce
greenhouse gas emissions and will moreover improve the process
efficiency for the users," said Rodrigo Elizondo, commercial
director at Solvay’s Spec-
ial Chem business unit. "We will produce these F2
gas mixtures in our plants in Bad Wimpfen, Germany and Onsan,
Korea," he added.
The project is partly funded by the German Federal Ministry
of Research and Education (BMBF) and will start on 1
The move by Solvay to introduce these new products was
announced in December as the COP21 climate change talks in
Paris were nearing their conclusion.
A Solvay spokesperson told IM: "This
project helps to achieve the targets of COP21 through avoiding
further increases of climate relevant gases like
NF3, C2F6 and